Therefore, such factors having effect on the precision of deep UV lithography as diffraction effect, exposure dosage, wavelength and distribution of fly's eyes lens etc. 同时由于紫外光的衍射效应,获得高精度的大高宽比结构并不容易。本文深入研究了影响紫外深度光刻图形转移精度的如下因素;
The Method of Reflective Fly Eye Lens Design for LED Illuminating Projection System 用于LED照明的反射型复眼设计方法
In traditional fly eye illumination systems, the elemental lens of fly eye always has the same aspect ratio as the LCD device. 传统的复眼照明系统设计方法中,复眼小透镜具有与液晶板相同的长宽比,可以获得能量利用率和均匀性都比较好的照明光斑。
Fly Eye Lens Array Used in Liquid Crystal Projection Display with High Light Efficiency 复眼透镜提高液晶投影照明系统的能量利用率
Uniformity of the Illuminative System with Fly's Eye Lens 复眼透镜照明系统的均匀性
Design on a fly lens array illumination system applied in LC rear projective TV 液晶背投影电视中蝇眼透镜阵列照明系统的设计
A new vision on the fly system is proposed based on the beam splitting lens according to the demand of component picking and placing in the electronic manufacturing equipments. 针对电子制造设备中元件拾放的定位对准需求,提出了一种基于半透半反镜的飞行视觉系统设计方案。